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Thorsten Lill

Atomic Layer Processing

Atomic Layer Processing

Normaler Preis €142,00
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Produktbeschreibung

This practical guide, written by an author actively involved in corporate R&D, provides in-depth information on etching technologies that are used in the semiconductor industry, helping engineers to select the right technologies for their task and to design etching processes.

Produktdetails

  • ISBN-13: 9783527346684
  • ISBN-10: 3527346686
  • ASIN: 3527346686
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